2/17/22 16:32  | 2/15/22  | ONTO | Onto Innovation Inc. | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | MA | D |  | S | -5,481 | 89.78 | 0 | -61 | -95 | 4 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
12/10/21 13:21  | 12/8/21  | ONTO | Onto Innovation Inc. | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | MA | D |  | S | -2,221 | 98.12 | 0 | -23 | -26 | 66 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
11/3/21 17:12  | 11/1/21  | ONTO | Onto Innovation Inc. | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | MA | D |  | S | -4,018 | 80.36 | 0 | -50 | -36 | 89 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
6/17/21 11:56  | 6/15/21  | ONTO | Onto Innovation Inc. | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | MA | D |  | S | -323 | 75.16 | 0 | -4 | -3 | 139 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
6/15/21 10:26  | 6/11/21  | ONTO | Onto Innovation Inc. | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | MA | D |  | S.m | -3,432 | 75.10 | 0 | -46 | -24 | 143 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
5/26/21 14:44  | 5/24/21  | ONTO | Onto Innovation Inc. | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | MA | D |  | S | -1,966 | 65.52 | 0 | -30 | -14 | 189 | I |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
4/14/21 16:31  | 4/12/21  | ONTO | Onto Innovation Inc. | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | MA | D |  | S.m | -3,537 | 70.74 | 0 | -50 | -19 | 216 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
2/12/21 18:27  | 2/11/21  | ONTO | Onto Innovation Inc. | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | MA | D |  | S | -8,838 | 60.81 | 0 | -145 | -34 | 281 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
2/11/21 17:19  | 2/9/21  | ONTO | Onto Innovation Inc. | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | MA | D |  | S.m | -3,248 | 59.42 | 0 | -55 | -11 | 426 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
12/1/20 17:15  | 11/27/20  | ONTO | Onto Innovation Inc. | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | MA | D |  | S | -113 | 45.00 | 0 | -3 | -1 | 482 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
11/25/20 16:48  | 11/24/20  | ONTO | Onto Innovation Inc. | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | MA | D |  | S | -251 | 45.01 | 0 | -6 | -1 | 485 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
11/9/20 15:50  | 11/5/20  | ONTO | Onto Innovation Inc. | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | MA | D |  | S | -3,712 | 37.12 | 0 | -100 | -17 | 490 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
1/21/20 14:21  | 1/16/20  | ONTO | Onto Innovation Inc. | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | MA | D |  | S | -3,201 | 40.01 | 0 | -80 | -12 | 585 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
11/19/19 13:39  | 11/15/19  | ONTO | Onto Innovation Inc. | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | MA | D |  | S | -867 | 34.66 | 0 | -25 | -4 | 667 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
8/7/18 17:54  | 8/6/18  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | M.d | 54 | 14.80 | 0 | 4 | 1 | 690 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
8/7/18 17:54  | 8/6/18  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S.d | -156 | 42.65 | 0 | -4 | -1 | 690 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
5/8/18 17:45  | 5/4/18  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S | -1,756 | 35.12 | 0 | -50 | -7 | 686 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
2/26/18 16:50  | 2/22/18  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | M.d | 52 | 15.74 | 0 | 3 | 0 | 737 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
2/26/18 16:50  | 2/22/18  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S.d | -89 | 26.76 | 0 | -3 | 0 | 737 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
6/9/17 16:03  | 6/8/17  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S | -295 | 29.47 | 0 | -10 | -1 | 738 | D |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 
5/9/17 16:56  | 5/5/17  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S | -288 | 28.83 | 9 | -10 | -1 | 745 | D | 80 | 58 | 33 | 10 | -6 | -2 | -12 | 2 | -1 |  |  |  |  |  | 
11/30/16 17:58  | 11/29/16  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | M.d | 77 | 10.93 | 4 | 7 | 1 | 756 | D | 63 | 54 | 27 | 17 | 21 | 10 | 1 | 1 | -6 | -3 | 6 | 14 |  |  | 
11/30/16 17:58  | 11/29/16  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S.d | -906 | 24.43 | 4 | -37 | -5 | 756 | D | 63 | 54 | 27 | 17 | 21 | 10 | 1 | 1 | -6 | -3 | 6 | 14 |  |  | 
10/4/16 16:55  | 10/3/16  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S | -221 | 22.08 | 2 | -10 | -1 | 786 | D | 39 | 71 | 45 | 7 | 4 | 7 | -2 | -2 | 2 | 2 | -5 | 14 | 37 |  | 
7/6/16 17:07  | 7/1/16  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S | -205 | 20.51 | 4 | -10 | -1 | 795 | D | 11 | 28 | 39 | 35 | 14 | 9 | -1 | 1 | 0 | 6 | -3 | 8 | 23 |  | 
6/23/16 17:03  | 6/21/16  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S | -201 | 20.08 | 3 | -10 | -1 | 805 | D | 14 | 30 | 28 | 46 | 14 | 6 | 9 | 9 | -2 | -2 | 6 | 6 | 24 |  | 
5/4/16 19:31  | 5/2/16  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | M.d | 116 | 8.89 | 3 | 13 | 2 | 808 | D | 13 | 16 | 19 | 29 | 28 | 20 | 16 | 3 | -1 | 1 | 8 | 12 | 17 |  | 
5/4/16 19:31  | 5/2/16  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S.d | -232 | 17.85 | 3 | -13 | -2 | 808 | D | 13 | 16 | 19 | 29 | 28 | 20 | 16 | 3 | -1 | 1 | 8 | 12 | 17 |  | 
2/25/15 16:49  | 2/23/15  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | M.d | 10 | 6.00 | 2 | 2 | 0 | 802 | D | 24 | -3 | 7 | 31 | 11 | -1 | -1 | 2 | 1 | -2 | -3 | -16 | -26 | -24 | 
2/25/15 16:49  | 2/23/15  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S.d | -28 | 17.10 | 2 | -2 | 0 | 802 | D | 24 | -3 | 7 | 31 | 11 | -1 | -1 | 2 | 1 | -2 | -3 | -16 | -26 | -24 | 
1/6/15 16:09  | 1/2/15  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | M.d | 29 | 11.63 | 2 | 3 | 0 | 802 | D | 6 | -10 | -9 | 6 | 21 | 9 | 0 | -1 | 1 | 2 | 12 | -2 | -2 | -7 | 
1/6/15 16:09  | 1/2/15  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S.d | -41 | 16.37 | 2 | -3 | 0 | 802 | D | 6 | -10 | -9 | 6 | 21 | 9 | 0 | -1 | 1 | 2 | 12 | -2 | -2 | -7 | 
9/29/14 16:02  | 9/25/14  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | M.d | 17 | 6.65 | 1 | 3 | 0 | 802 | D | 11 | -2 | -12 | -15 | -5 | -4 | -2 | 1 | -2 | 1 | -7 | 7 | 10 | -21 | 
9/29/14 16:02  | 9/25/14  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S.d | -38 | 15.14 | 1 | -3 | 0 | 802 | D | 11 | -2 | -12 | -15 | -5 | -4 | -2 | 1 | -2 | 1 | -7 | 7 | 10 | -21 | 
8/19/14 16:32  | 8/15/14  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S | -165 | 16.50 | 2 | -10 | -1 | 802 | D | 13 | 22 | -9 | 2 | -7 | 3 | 3 | 4 | 0 | -2 | -5 | -12 | 2 | -16 | 
8/6/14 19:02  | 8/4/14  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S.m | -488 | 16.27 | 2 | -30 | -4 | 812 | D | 9 | 1 | -1 | 2 | -9 | -12 | -1 | 4 | -1 | -1 | -1 | -19 | 7 | -18 | 
6/27/14 16:34  | 6/26/14  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | M.d | 7 | 2.71 | 1 | 3 | 0 | 842 | D | 19 | 21 | -3 | 1 | 15 | 5 | 1 | 1 | -1 | 1 | -11 | -18 | -10 | -10 | 
6/27/14 16:34  | 6/26/14  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S.d | -44 | 17.75 | 1 | -3 | 0 | 842 | D | 19 | 21 | -3 | 1 | 15 | 5 | 1 | 1 | -1 | 1 | -11 | -18 | -10 | -10 | 
3/31/14 16:48  | 3/28/14  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | M.d | 3 | 1.20 | 2 | 3 | 0 | 836 | D | -5 | 24 | 12 | -4 | -4 | -5 | -4 | -5 | 2 | -4 | -10 | 2 | -13 | -5 | 
3/31/14 16:48  | 3/28/14  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S.d | -45 | 17.87 | 2 | -3 | 0 | 836 | D | -5 | 24 | 12 | -4 | -4 | -5 | -4 | -5 | 2 | -4 | -10 | 2 | -13 | -5 | 
12/31/13 15:11  | 12/30/13  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | M.d | 3 | 1.13 | 2 | 3 | 0 | 836 | D | 6 | 32 | 30 | 17 | 10 | 6 | 3 | 1 | 1 | -3 | -9 | -3 | -1 | -11 | 
12/31/13 15:11  | 12/30/13  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S.d | -46 | 18.54 | 2 | -3 | 0 | 836 | D | 6 | 32 | 30 | 17 | 10 | 6 | 3 | 1 | 1 | -3 | -9 | -3 | -1 | -11 | 
12/12/13 16:28  | 12/11/13  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S | -90 | 17.90 | 1 | -5 | -1 | 836 | D | 5 | 21 | 17 | 18 | -4 | 1 | 0 | 0 | 1 | 5 | 1 | 5 | 0 | -12 | 
11/26/13 18:40  | 11/26/13  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S | -93 | 18.55 | 3 | -5 | -1 | 841 | D | 11 | 27 | 23 | 29 | 10 | 3 | 6 | 3 | 0 | -4 | -1 | -1 | -9 | -21 | 
11/25/13 16:31  | 11/21/13  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S.m | -179 | 17.93 | 3 | -10 | -1 | 846 | D | 10 | 28 | 22 | 29 | 9 | 3 | 4 | 4 | 3 | -1 | 2 | 0 | -6 | -19 | 
11/22/13 16:54  | 11/8/13  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | M.ad | 214 | 8.55 | 3 | 25 | 3 | 866 | D | 5 | 26 | 23 | 27 | 7 | 1 | 2 | 4 | 0 | 4 | 2 | 1 | -3 | -23 | 
11/22/13 16:54  | 11/8/13  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S.ad | -425 | 16.98 | 3 | -25 | -3 | 866 | D | 5 | 26 | 23 | 27 | 7 | 1 | 2 | 4 | 0 | 4 | 2 | 1 | -3 | -23 | 
11/20/13 17:42  | 11/19/13  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S | -175 | 17.53 | 3 | -10 | -1 | 856 | D | 0 | 27 | 22 | 30 | 7 | -6 | 1 | 2 | 1 | 5 | 4 | 5 | -5 | -23 | 
11/12/13 16:24  | 11/8/13  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | M.d | 400 | 15.98 | 3 | 25 | 3 | 866 | D | 1 | 25 | 21 | 23 | 8 | 3 | -6 | -1 | 0 | -1 | 3 | 6 | -10 | -18 | 
11/12/13 16:24  | 11/8/13  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S.d | -425 | 16.98 | 3 | -25 | -3 | 866 | D | 1 | 25 | 21 | 23 | 8 | 3 | -6 | -1 | 0 | -1 | 3 | 6 | -10 | -18 | 
10/1/13 13:06  | 9/30/13  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | M.d | 5 | 2.11 | 1 | 3 | 0 | 866 | D | 6 | 18 | 16 | 11 | 19 | 4 | 0 | 1 | 0 | 1 | 2 | 17 | 14 | -6 | 
10/1/13 13:06  | 9/30/13  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S.d | -40 | 15.87 | 1 | -3 | 0 | 866 | D | 6 | 18 | 16 | 11 | 19 | 4 | 0 | 1 | 0 | 1 | 2 | 17 | 14 | -6 | 
3/14/12 20:15  | 3/13/12  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S | -349 | 17.44 | 3 | -20 | -2 | 857 | D | 97 | 9 | 16 | -2 | -13 | -6 | 0 | 2 | 1 | 4 | 4 | -10 | -12 | -11 | 
12/6/11 17:28  | 12/2/11  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S | -171 | 17.14 | 4 | -10 | -1 | 877 | D | 37 | 38 | 4 | 23 | -3 | 0 | 11 | 5 | 1 | -2 | 2 | -6 | -13 | -18 | 
5/18/11 20:43  | 5/16/11  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S | -22 | 15.48 | 5 | -1 | 0 | 885 | I | 788 | 33 | 29 | -14 | -14 | -10 | -2 | -6 | -1 | -6 | 6 | 3 | 10 | -9 | 
3/2/11 17:34  | 2/28/11  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S | -180 | 17.99 | 13 | -10 | -1 | 883 | D | 999 | 74 | 27 | 48 | 2 | -9 | -14 | -3 | 2 | -1 | -2 | -11 | -8 | -1 | 
9/15/10 19:07  | 9/13/10  | NANO | Nanometrics Inc | DE | Electr | LabEq | Measuring & Controlling Devic | Rhine Bruce C | CA | D |  | S.m | -395 | 13.16 | 13 | -30 | -3 | 894 | D | 325 | 80 | 52 | 19 | 41 | -5 | -8 | 0 | -2 | 3 | 9 | -5 | 21 | 16 |